✦ LIBER ✦
Development of metal etch mask by single layer lift-off for silicon nitride photonic crystals
✍ Scribed by Kang-mook Lim; Shilpi Gupta; Chad Ropp; Edo Waks
- Book ID
- 104052871
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 1009 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.