Stable preparation process of superconductor–insulator multilayer films for HTS devices by off-axis magnetron sputtering
✍ Scribed by S. Adachi; H. Wakana; Ai Kamitani; K. Tanabe
- Book ID
- 103889707
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 743 KB
- Volume
- 445-448
- Category
- Article
- ISSN
- 0921-4534
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✦ Synopsis
The preparation process for epitaxial multilayer films consisting of Y 0.9 La 0.2 Ba 1.9 Cu 3 O y (La-YBCO) and SrSnO 3 (SSO) for high-T c superconductor (HTS) electronic devices was developed. Four-layer films of SSO/La-YBCO/SSO/La-YBCO were deposited on BaZrO 3buffered MgO(1 0 0) substrates by off-axis magnetron sputtering. During deposition, the substrates were directly heated from backside by thermal radiation of a heater. No adhesive paste, such as Ag, for fixing the substrate was used in order to avoid contamination. Deposition conditions, especially the heater temperature profiles and atmosphere during elevating the temperature, were carefully controlled. The multilayer films with the average surface roughness R a around 2.0 nm were prepared with high reproducibility. Continuous production of the high-quality films throughout one year proved excellent stability of the preparation process.