✦ LIBER ✦

Preparation of microcrystalline silicon films at ultra high-rate of 10 nm/s using high-density plasma

✍ Scribed by Chisato Niikura; Michio Kondo; Akihisa Matsuda

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Development of microcrystalline silicon

✍ M. Takashiri; T. Tabuchi 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 426 KB

High rate deposition of microcrystalline

✍ Zewen Zuo; Yu Wang; Jin Lu; Junzhuan Wang; Lin Pu; Yi Shi; Youdou Zheng 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 967 KB

In situ study on the growth of microcrys

✍ Haijun Jia; Hajime Shirai 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 553 KB

High rate (∼3 nm/s) deposition of dense

✍ F.J.H. van Assche; W.M.M. Kessels; R. Vangheluwe; W.S. Mischke; M. Evers; M.C.M. 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 312 KB

Influence of substrate dc bias on crysta

✍ N. Kosku; H. Murakami; S. Higashi; S. Miyazaki 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 210 KB

Microstructures of high-growth-rate (up

✍ Y. Sobajima; S. Nakano; M. Nishino; Y. Tanaka; T. Toyama; H. Okamoto 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 417 KB