✦ LIBER ✦
Influence of substrate dc bias on crystallinity of silicon films grown at a high rate from inductively-coupled plasma CVD
✍ Scribed by N. Kosku; H. Murakami; S. Higashi; S. Miyazaki
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 210 KB
- Volume
- 244
- Category
- Article
- ISSN
- 0169-4332
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