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Preparation of freestanding AlN substrates by hydride vapor phase epitaxy using hybrid seed substrates

✍ Scribed by Toru Nagashima; Akira Hakomori; Takafumi Shimoda; Keiichiro Hironaka; Yuki Kubota; Toru Kinoshita; Reo Yamamoto; Kazuya Takada; Yoshinao Kumagai; Akinori Koukitu; Hiroyuki Yanagi

Book ID: 116630158
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 685 KB
Volume: 350
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2011.12.027

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