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Preparation and Characterization of High Porosity Si02 Xerogels for Low k Dielectrics

✍ Scribed by Colomer, M. T.

Book ID: 120648216
Publisher: Cambridge University Press
Year: 1999
Weight: 645 KB
Volume: 565
Category: Article
ISSN: 0272-9172
DOI: 10.1557/PROC-565-211

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