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Preparation and characterization of sol–gel derived CaZrO3 dielectric thin films for high-k applications

✍ Scribed by T. Yu; W.G. Zhu; C.H. Chen; X.F. Chen; R.Gopal Krishnan

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
444 KB
Volume
348
Category
Article
ISSN
0921-4526

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