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Precise analysis on shave-off depth profiling

✍ Scribed by M. Nojima; T. Yamamoto; Y. Ishizaki; M. Owari; Y. Nihei

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 219 KB
Volume: 258
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.187

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Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth proÐling analysis of thin, insulating barrier anodic Ðlms formed on aluminium. It allows ready and rapid analysis of the Ðlms, with depth resolution and sensitivity