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Influence of surface roughness on the depth resolution of GDOES depth profiling analysis

โœ Scribed by Shimizu, K.; Brown, G. M.; Habazaki, H.; Kobayashi, K.; Skeldon, P.; Thompson, G. E.; Wood, G. C.

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
220 KB
Volume
27
Category
Article
ISSN
0142-2421

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โœฆ Synopsis

Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth proรling analysis of thin, insulating barrier anodic รlms formed on aluminium. It allows ready and rapid analysis of the รlms, with depth resolution and sensitivity comparable with, or better than, those of secondary ion mass spectrometry depth proรling. However, for successful application of the technique, surfaces of specimens should be microscopically ร‘at ; surface roughness of dimensions similar to the thickness of the รlms can lead to almost total degradation of the depth proรles.

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