Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth proÐling analysis of thin, insulating barrier anodic Ðlms formed on aluminium. It allows ready and rapid analysis of the Ðlms, with depth resolution and sensitivity
Effects of surface structure on depth resolution of AES depth profiles of Ni/Cr multilayers
✍ Scribed by A. Zalar; B. Praček; P. Panjan
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 261 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0142-2421
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Sputtering-induced surface roughness is the main source of degradation of the depth resolution observed during depth proÐling of polycrystalline metals. Atomic force microscopy (AFM) images of polycrystalline Al Ðlms at di †erent mean sputtered depths are used to calculate both the depth distributio
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