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GDOES depth profiling analysis of a thin surface film on aluminium

✍ Scribed by Shimizu, K.; Habazaki, H.; Skeldon, P.; Thompson, G. E.; Wood, G. C.

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
170 KB
Volume
27
Category
Article
ISSN
0142-2421

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✦ Synopsis

Analysis of a surface film ~4 nm thick formed on electropolished, high-purity aluminium given a postelectropolishing treatment in a hot CrO 3 -H 3 PO 4 solution demonstrates the suitability of glow discharge optical emission spectroscopy for in-depth analysis of very thin films. Thus, the distributions of impurity species, namely chromium, hydrogen and phosphorus species, in the film are revealed, with excellent depth resolution. Further, copper enrichment in a thin layer a few nanometres thick in the metal immediately beneath the surface film, resulting from initial oxidation of aluminium during electropolishing, is revealed.

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