Glow discharge optical emission spectrometry (GDOES) depth profiling analysis of anodic alumina films—a depth resolution study

✍ Scribed by Shimizu, K.; Brown, G. M.; Habazaki, H.; Kobayashi, K.; Skeldon, P.; Thompson, G. E.; Wood, G. C.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 247 KB
• Volume: 27
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199901)27:1<24::aid-sia457>3.0.co;2-n

✦ Synopsis

Anodic alumina Ðlms with precisely known distributions of incorporated species have been used as standards for glow discharge optical emission spectrometry (GDOES) depth proÐling analysis to quantify depth resolution. It is evident that the depth resolution of GDOES is excellent and is comparable with, or better than, secondary ion mass spectrometry depth proÐling of similar Ðlms. Further, the sensitivity for detection of elements is also high, given the amounts of impurity species detected successfully. Thus, GDOES, with its further ability of routine and rapid analysis of Ðlms (organic, inorganic or metallic) of thicknesses up to several hundreds of microns, has signiÐcant potential in studies of the corrosion and Ðlming behaviour of materials.

1999 John Wiley & Sons, ( Ltd.