Highly accurate shave-off depth profiling by simulation method

✍ Scribed by M. Fujii; K. Nakamura; Y. Ishizaki; M. Nojima; M. Owari; Y. Nihei

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 377 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.022