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Positive pulse bias method in plasma-based ion implantation

✍ Scribed by T. Ikehata; K. Shimatsu; N.Y. Sato; H. Mase

Book ID
114167179
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
238 KB
Volume
206
Category
Article
ISSN
0168-583X

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It is well known that aluminium is quite resistant against aqueous corrosion, but suffers from poor tribological properties. A possible solution is the formation of a hard carbide film or deposition of a film of diamond-like carbon. Plasma-based ion implantation with hydrocarbon gases is a method to