✦ LIBER ✦
Plasma source ion implantation of metal ions: synchronization of cathodic-arc plasma production and target bias pulses
✍ Scribed by B.P. Wood; W.A. Reass; I. Henins
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 492 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0257-8972
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