✦ LIBER ✦

Nitrogen profiles in materials implanted via plasma-based ion implantation

✍ Scribed by A Lacoste; S Béchu; Y Arnal; J Pelletier; C Vallée; R Gouttebaron; J.P Stoquert

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Titanium implantation profiles in silico

✍ Masao Koto; Kazuto Ohno; Shinzo Yoshikado; Ken Yukimura; Shunji Kurooka; Yasuo S 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 374 KB

Structural changes of Si surfaces by nit

✍ Setsuo Nakao 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 315 KB

TiN coating and ion implantation of mate

✍ M Sano; T Teramoto; K Yukimura; T Maruyama 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 238 KB

Nitrogen ion implantation of silicon in

✍ Mehboob Sadiq; S. Ahmad; M. Shafiq; M. Zakaullah 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 770 KB

Formation of concentration profiles of i

✍ T. V. Vakhnii; G. A. Vershinin; I. A. Bozhko; I. A. Kurzina; Yu. P. Sharkeev; T. 📂 Article 📅 2008 🏛 Pleiades Publishing 🌐 English ⚖ 178 KB

Numerical simulation of plasma implanted

✍ X.B. Tian; P. Peng; P.K. Chu 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 115 KB