Surface wettabiliy of nitrogen plasma-im
β
G.J. Wan; R.K.Y. Fu; P. Yang; J.P.Y. Ho; X. Xie; N. Huang; P.K. Chu
π
Article
π
2006
π
Elsevier Science
π
English
β 178 KB
Silicon wafers were implanted with nitrogen by plasma immersion ion implantation (PIII) to alter the surface hydrophilic properties and wettability. Our X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FTIR) and contact angle measurements indicate that the Si-N bonds