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Structural changes of Si surfaces by nitrogen implantation using plasma based ion implantation

✍ Scribed by Setsuo Nakao

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 315 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.117

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