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Porosity and oxidation of amorphous silicon films prepared by evaporation, sputtering and plasma-deposition

✍ Scribed by H. Fritzsche; C.C. Tsai

Publisher
Elsevier Science
Year
1979
Weight
490 KB
Volume
1
Category
Article
ISSN
0165-1633

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πŸ“œ SIMILAR VOLUMES

Preparation of hydrogenated amorphous si
Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition
✍ J Huran; J Ε afrΓ‘nkovΓ‘; A.P. Kobzev πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic