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Polymeric Sacrificial Layers for the Control of Microstructure and Porosity of Oxide Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition

✍ Scribed by Barranco, A.; Cotrino, J.; Yubero, F.; González-Elipe, A. R.


Book ID
127231373
Publisher
American Chemical Society
Year
2003
Tongue
English
Weight
201 KB
Volume
15
Category
Article
ISSN
0897-4756

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