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Polycrystalline-silicon tfts fabricated at low temperature using ion doping technique

✍ Scribed by Atsushi Yoshinouchi; Akihiro Oda; Masataka Itoh; Tatsuo Morita; Shuhei Tsuchimoto

Book ID: 112078830
Publisher: John Wiley and Sons
Year: 1993
Tongue: English
Weight: 524 KB
Volume: 76
Category: Article
ISSN: 8756-663X
DOI: 10.1002/ecjb.4420761013

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