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Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils

✍ Scribed by Jaehyun Moon; Yong-Hae Kim; Dong-Jin Park; Choong-Heui Chung; Seung-Youl Kang; Jin-Ho Lee

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Self-aligned nickel, cobalt/tantalum nit

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