Direct fabrication of large-grain polycrystalline silicon thin films by RF-biased RF-PECVD at low temperature

✍ Scribed by Jian-De Gu; Pei-Li Chen

• Book ID: 108288916
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 786 KB
• Volume: 498
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2005.07.053