✦ LIBER ✦
Fabrication of SiN films at low temperature by RF biased coaxial-line microwave plasma CVD
✍ Scribed by Yoshinori Morita; Isamu Kato; Tatsuji Nakajima
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 641 KB
- Volume
- 79
- Category
- Article
- ISSN
- 8756-663X
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