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Polishing of (1 0 0) γ-LiAlO2 wafer and its effect on the epitaxial growth of ZnO films by MOCVD

✍ Scribed by Hui Lin; Shengming Zhou; Hao Teng; Tingting Jia; Xiaorui Hou; Shulin Gu; Shunming Zhu; Zili Xie; Ping Han; Rong Zhang

Book ID: 116604626
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 576 KB
Volume: 479
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2008.12.086

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Polishing of (1 0 0) γ-LiAlO2 wafer and its effect on the epitaxial growth of ZnO films by MOCVD