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Plasma wall interaction for TiNx film deposition in a hollow cathode arc discharge

✍ Scribed by C. Eggs; H. Kersten; H.-E. Wagner; H. Wulff

Book ID: 114086120
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 368 KB
Volume: 290-291
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)09125-0

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