✦ LIBER ✦
Optical emission spectroscopy in reactive hollow cathode arc discharge plasmas – Local distribution of active species during the deposition of hard carbon films
✍ Scribed by V. Hemel; H. Bolt; F. Koch; H. Nickel
- Book ID
- 113022353
- Publisher
- Springer
- Year
- 1996
- Tongue
- English
- Weight
- 158 KB
- Volume
- 355
- Category
- Article
- ISSN
- 1618-2650
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