✦ LIBER ✦
On the ion energy transfer to the substrate during titanium deposition in a hollow cathode arc discharge
✍ Scribed by H Kersten; H Steffen; D Vender; HE Wagner
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 383 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0042-207X
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