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Deposition of titanium in a hollow cathode arc discharge: correlation between deposition conditions and film properties

✍ Scribed by H. Steffen; C. Eggs; H. Kersten

Book ID: 114086124
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 287 KB
Volume: 290-291
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)09129-8

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