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Plasma State of Pulse Reactive Magnetron Sputtering ZnO: Al Thin Films

✍ Scribed by L.N. Li; Y. Zhao; X.L. Chen; Q. Huang; Y.F. Wang; X.D. Zhang

Book ID: 116833368
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 806 KB
Volume: 32
Category: Article
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2012.03.581

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