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Plasma polymerization. X. A systematic investigation of materials synthesized in inductively coupled plasmas excited in tetrafluoropyridazine

✍ Scribed by Clark, D. T. ;Abu-shbak, M. M.


Book ID
105335088
Publisher
John Wiley and Sons
Year
1984
Weight
811 KB
Volume
22
Category
Article
ISSN
0360-6376

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Plasma polymerization. VIII. A comparati
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## Abstract An ESCA investigation has been made of the plasma polymers produced from the isomeric tri‐, di‐, and monofluorobenzenes in inductively coupled plasmas. Comparison is drawn with other published data on perfluoro‐, pentafluoro‐, and isomeric tetrafluorobenzenes. The data reveal that exten

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