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Plasma polymerization. VIII. A comparative study of the plasma polymers produced from inductively coupled plasmas excited in the fluorobenzenes

✍ Scribed by Clark, D. T. ;Abrahman, M. Z.

Publisher: John Wiley and Sons
Year: 1982
Weight: 718 KB
Volume: 20
Category: Article
ISSN: 0360-6376
DOI: 10.1002/pol.1982.170200707

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✦ Synopsis

Abstract

An ESCA investigation has been made of the plasma polymers produced from the isomeric tri‐, di‐, and monofluorobenzenes in inductively coupled plasmas. Comparison is drawn with other published data on perfluoro‐, pentafluoro‐, and isomeric tetrafluorobenzenes. The data reveal that extensive molecular rearrangement accompanies polymerization and that proportionately the C:F stoichiometry shows a decrease in fluorine content relative to the monomer in going from perfluoro‐ to monofluorobenzene. Internal stress, critical surface tensions, and coefficients of friction are compared for the plasma polymers.

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