A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N[sub 2]) Inductively Coupled Plasmas

✍ Scribed by Kwon, Kwang-Ho; Efremov, Alexander; Kim, Moonkeun; Min, Nam Ki; Jeong, Jaehwa; Kim, Kwangsoo

• Book ID: 125487664
• Publisher: The Electrochemical Society
• Year: 2010
• Tongue: English
• Weight: 187 KB
• Volume: 157
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.3362943