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Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas

✍ Scribed by Joseph, E. A.; Zhou, B.; Sant, S. P.; Overzet, L. J.; Goeckner, M. J.

Book ID: 125465808
Publisher: AVS (American Vacuum Society)
Year: 2004
Tongue: English
Weight: 502 KB
Volume: 22
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1722614

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