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Functional plasma polymers deposited in capacitively and inductively coupled plasmas

✍ Scribed by Hegemann, Dirk; Korner, Enrico; Chen, Shang; Benedikt, Jan; von Keudell, Achim

Book ID: 115452085
Publisher: American Institute of Physics
Year: 2012
Tongue: English
Weight: 419 KB
Volume: 100
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3681382

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