Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

✍ Scribed by Miyoshi, Y.; Petrovic, Z.L.; Makabe, T.

• Book ID: 118203398
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 182 KB
• Volume: 30
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2002.1003958