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Plasma motion in a filtered cathodic vacuum arc

✍ Scribed by Veerasamy, V.S.; Amaratunga, G.A.J.; Milne, W.I.

Book ID
117862293
Publisher
IEEE
Year
1993
Tongue
English
Weight
706 KB
Volume
21
Category
Article
ISSN
0093-3813

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## Abstract A Filtered Cathodic Vacuum Arc (FCVA) deposition system has been used to produce Al~2~O~3~/Al/Al~2~O~3~ trilayers for use as optically absorbing coatings. Ellipsometry was used to measure the optical constants of the AlO__~x~__ films and X‐ray photoelectron spectroscopy (XPS) was used t