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Device quality ZnO grown using a Filtered Cathodic Vacuum Arc

✍ Scribed by Salim Elzwawi; Hyung Suk Kim; Robert Heinhold; Max Lynam; Gary Turner; Jim G. Partridge; Dougal G. McCulloch; Roger J. Reeves; Martin W. Allen


Book ID
116833939
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
472 KB
Volume
407
Category
Article
ISSN
0921-4526

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## Abstract A Filtered Cathodic Vacuum Arc (FCVA) deposition system has been used to produce Al~2~O~3~/Al/Al~2~O~3~ trilayers for use as optically absorbing coatings. Ellipsometry was used to measure the optical constants of the AlO__~x~__ films and X‐ray photoelectron spectroscopy (XPS) was used t