✦ LIBER ✦

Plasma immersion ion implantation for silicon processing

✍ Scribed by Yankov, Rossen A.; Mändl, Stephan

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Instrumental and process considerations

✍ Chu, P.K.; Shu Qin; Chung Chan; Cheung, N.W.; Ko, P.K. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 160 KB

Processing considerations with plasma im

✍ Nathan W Cheung 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 788 KB

Low pressure plasma immersion ion implan

✍ Zhi-Neng Fan; Qing-Chuan Chen; Chu, P.K.; Chung Chan 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 206 KB

Plasma-immersion ion implantation

✍ Rainer W Thomae 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 138 KB

Porous silicon implanted with nitrogen b

✍ A.F Beloto; M Ueda; E Abramof; J.R Senna; N.F Leite; M.D da Silva; H Reuther 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 111 KB

Electrical effects of nitrogen plasma im

✍ S-M. Chen; J.M. Shannon; R.M. Gwilliam; B.J. Sealy 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 433 KB