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Low pressure plasma immersion ion implantation of silicon

✍ Scribed by Zhi-Neng Fan; Qing-Chuan Chen; Chu, P.K.; Chung Chan

Book ID: 114558638
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 206 KB
Volume: 26
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.747884

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