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Plasma Etch Processes for Embedded FRAM Integration

✍ Scribed by Celii, Francis G.; Thakre, Mahesh; Gay, Mark K.; Summerfelt, Scott R.; Aggarwal, Sanjeev; Martin, J. Scott; Hall, Lindsey; Udayakumar, K. R.; Moise, Ted S.

Book ID: 120081734
Publisher: Taylor and Francis Group
Year: 2003
Tongue: English
Weight: 491 KB
Volume: 53
Category: Article
ISSN: 1058-4587
DOI: 10.1080/10584580390258183

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