✦ LIBER ✦
Audio frequency plasma generation reactor configurations for dry etch processing
✍ Scribed by Guy J.J. Brasseur; Pierre Bruneel; Christiane Jehoul; Johan Vandersmissen
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 220 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.