✦ LIBER ✦
A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region
✍ Scribed by Goto, Tetsuya; Hirayama, Masaki; Yamauchi, Hiroshi; Moriguchi, Makoto; Sugawa, Shigetoshi; Ohmi, Tadahiro
- Book ID
- 111897745
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2003
- Tongue
- English
- Weight
- 159 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0021-4922
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