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Plasma enriched deposition technique will boost thin-film production


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
822 KB
Volume
26
Category
Article
ISSN
0042-207X

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โœฆ Synopsis


Thin-film production in the electronics industry can be improved significantly by means of the new Plasma Enriched Deposition (PED) Accessory.


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