958. A summary of thin film deposition techniques: D Anderson,Semiconductor Products Solid State Techn, 9, 1966, 27–29

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 138 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)90960-8