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A summary of thin film deposition techniques : Don Anderson, SCP and Solid State Technology, December (1966), p. 27.

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 206 KB
Volume: 6
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(67)90148-5

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