Automatic control and monitoring system for thin-film deposition : H. H. A. Bath, J. English and W. Steckelmacher. SCP and Solid State Technol., Part 1, January (1967), p. 27; Part 2, February (1967), p. 25

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 99 KB
• Volume: 7
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(68)90282-5