Automatic control and monitoring system for thin-film deposition : H. H. A. Bath, J. English and W. Steckelmacher, Electron. Compon., March (1966), p. 239

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 100 KB
• Volume: 6
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(67)90351-4