✦ LIBER ✦
Low temperature pulsed plasma deposition. Part I—a new technique for thin film deposition with complete gas dissociation
✍ Scribed by G. Scarsbrook; I.P. Llewellyn; S.M. Ojha; R.A. Heinecke
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 889 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0042-207X
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