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Plasma-enhanced chemical vapour deposition of thin GeO2, SnOx, GeO2SnOx, and In2O3 films

✍ Scribed by S. Reich; H. Suhr; B. Waimer


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
620 KB
Volume
189
Category
Article
ISSN
0040-6090

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